The JSM-6060 is a high-performance, compact, scanning electron microscope with excellent SE and BSE resolution. The intuitive PC interface allows the instrument to be easily operated. The specimen chamber can accommodate a specimen of up to 32mm in diameter (5 inches in diameter with large stage LGS option). Standard automated features include auto focus, auto gun (Bias), auto stig, auto saturation, and automatic contrast and brightness. The fully automatic Low Vacuum mode (on the JSM-6060LV model), allows for observation of specimens that cannot be viewed at high vacuum because of excessive water content or a nonconductive surface.
Other features include a fully eucentric stage and conical lens. The JSM-6060 is used in many and varied applications including routine inspection, forensics, contamination and failure analysis, quality control, reverse engineering, and new product development.